Solar cell diffusion equipment

Solar cell diffusion equipment, including diffusion furnace and platform exhaust. The operation flow of the solar cell diffusion equipment is that the exhaust gas generated in the diffusion furnace is discharged from the exhaust end of the platform through a pipeline, and the exhaust pressure control valve and the corresponding exhaust pressure controller are installed at the exhaust end of the platform. After the pressure of the exhaust air is stabilized, the implanted concentration of phosphorus in the silicon wafer is stabilized, and the sheet resistance is also stabilized, which can increase the efficiency of the final solar cell by 5%.

The diffusion furnace is the core component of the PN junction formed by the solar cells. The quality of the diffusion furnace directly affects the performance of the cell. Currently, the popular diffusion methods of solar energy manufacturers include open tube diffusion, closed tube diffusion, and soft landing diffusion. The yield of open tube diffusion is relatively low, and the amount of partial phosphoric acid is relatively large; the closed tube diffusion process is completely free from external environmental interference; According to the existing 6-8 inch integrated circuit diffusion equipment, the new concept proposed; the soft landing diffusion process quality is completely controlled; the process is toxic to the exhaust gas directed collection, centralized treatment of emissions; more environmentally friendly.